Projects/Slovak Republic/New materials and devices in submicrometer technology

 
RESEARCH PROJECT NAME

New materials and devices in submicrometer technology

 
DESCRIPTION

Govermental research project 51/03R0600 2003

Principal investigator: Slovak Academy of Sciences, Institute of Physics

Status of Department of Electron Beam Lithography (II SAS) in the project: Partner

Investigator II SAS: RNDr. Ivan Kostič

 
DETAILED INFORMATION

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PARTNERS    
 

Slovak Academy of Sciences, Polymer Institute

Slovak Academy of Sciences, Institute of Electrical Engineering